Ultra High Vacuum Piezo Stages and Systems

Ultra High Vacuum Piezo Stages and Systems

Most of SmarAct's stages are specially prepared for operation under vacuum conditions.

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商品描述

Most of SmarAct's stages are specially prepared for operation under vacuum conditions.


SmarAct’s stages and systems are not only perfectly suited for applications under atmo-spheric conditions, but in some cases also for more extreme environments like high vacuum  (HV, 10-6 mbar) and ultra-high vacuum (UHV, 1E-11 mbar).


Most of the stages presented on this website are available in versions specially prepared for operation under vacuum conditions.

UHV versions are bakeable at up to 150 °C and are available with two different cable types:


1、The cost efficient version utilizes Teflon insulated wires.

2、The Kapton® insulated version is a fluorine free solution.

Since SmarAct is a full solution provider, HV and UHV positioning systems are supplied with matching electrical feedthroughs. As standard, SmarAct uses:


1、HV as bulkhead LEMO® feedthroughs which are O-ring sealed.

2、UHV tightly welded designs for the use in UHV.

You are very welcome to contact our application scientists at any time to discuss your specific re-quirements.

For vacuum compatible stages of the SLC-17 and SLC-24 series that require post-installation baking, we recommend opting for the U-shaped base to increase the overall stiffness of the stage.


Please note that the U-shaped base has the usual mounting hole pattern, but increases the width of the stage itself by 6 mm. This changes the width of an SLC-17 stage to 23 mm and the width of an SLC-24 stage to 30 mm. Omitting the U-shaped base option is only advisable if compactness is the top requirement.



Atmospheric Conditions

High Vacuum (HV)

Ultra-High Vacuum (UHV)

Ultra-High Vacuum (UHVT)

Pressure

--

Down to 1E-6 mbar

Down to 1E-11 mbar

Down to 1E-11 mbar

Wiring

Teflon-insulated stranded wires with braided shield and Teflon coating

Teflon-insulated stranded wires with braided shield

Kapton-insulated stranded wires

Teflon-insulated stranded wires with braided shield

Grease

Standard grease

HV compatible grease

Grease-free

Grease-free

Sensor Options

S, L, I

S

S

S

Bake-Out Temperatur

--

Up to 130°C upon request

Recommended 130°C (max. 150°C)

Recommended 130°C (max. 150°C)

Vacuum Feedthrough

--

LEMO feedthroughs

- O-ring tightened by a screw nut

- Flanges available upon request

LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange

- DN40CF or DN63CF flange, other sizes upon reques

LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange

- DN40CF or DN63CF flange, other sizes upon request